Products & Technology
Deep Ultraviolet (DUV) Solarization Resistant Optical Fiber
Feature
No.1
Suitable for DUV light source
Suitable for DUV light source such as wavelength 215nm, 248nm, 360nm etc.
No.2
Slower deterioration
Slower deterioration of the fiber transmission loss due to DUV light allows deep DUV light transmission over an extended period.
No.3
Used for semiconductor
Used for semiconductor manufacturing equipment process monitoring.
Transmittance Wavelength Characteristics (Example of Typical Initial Characteristics)
Exposure Characteristics with Deuterium Lamp Light Source (Typical Example)
Exposure Test Results with ArF Excimer Laser Light Source
Examples of Applications
Fiber Bundle : Examples of the fiber bundles made with 200µm and 230µm core diameter fibers.
NOTE: Other fiber core sizes are available. For more details, please contact us.
